On phenomena in ionized gases
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- PECVD of DLC N-doped DLC Thin Films for Biomedical Applications
- 3. References
- Anomalous nonlinear effects in a weakly ionized gas exposed to a strong shock wave
- Characteristics of recombination plasma in divergent magnetic field on the linear divertor simulator TPD-Sheet IV
- 2. Results
- Deposition of diamond-like carbon film using high power impulse magnetron sputtering
1. Experiment Atmospheric pressure plasma jet on the basis of dielectric barrier discharge is a universal source of low temperature plasma [1,2]. In our experiments cold plasma was generated in the noble gas flow through a quartz tube. Two parallel cylindrical foils (electrodes) were attached to the quartz tube with length 80 mm, diameter 9 mm, an inner diameter of 7 mm. The distance between two electrodes was 15 mm. High voltage sinusoidal signal with a frequency f = 30 kHz was used. To register the current and the discharge voltage a high voltage probe (Tektronix P6015) and digital oscilloscope (Le Croy Wave Jet 354A) were used. The current is detected by low- voltage Le Croy probe and measuring resistor with resistance of 100 Ohms. The optical characteristics were measured by optical emission spectrometer Solar Systems.
Series of experiments were performed to determine the optimal gas flow and to identify the optimal conditions for obtaining the longest plasma jet length. With increasing gas flow rate the plasma jet length is increased up to a certain value and then the value is decreased (Figure 1). The reason for such behaviour is transition of gas flow from laminar to turbulent regime at high gas velocities in the quartz tube [3]. The plasma jet length was also studied as a function of the applied voltage on the electrodes. To determine the surface temperature in contact with the plasma jet the copper plate and a thermocouple was used. The results showed a decrease in the treated copper plate temperature at higher gas flow.
It is also revealed that the surface temperature in the contact with argon plasma much exceeds the temperature than in the case of helium. The emission spectrum was investigated for argon and helium at different discharge voltage and a fixed frequency and gas flow. In the both case results of optical emission spectroscopy of the plasma jet under atmospheric pressure indicates the presence of active chemical component and radicals as atomic oxygen, ozone, nitrous oxide and hydroxyl.
Figure 1. The dependence of plasma jet length on gas flow rate
[1] J. Winter, R. Brandenburg and K-D Weltmann, Plasma Sources Sci. Technol. 24 (2015) 064001.
[2] Y.A. Ussenov, T.S. Ramazanov, M.T. Gabdullin, M.K. Dosbolayev, T.T. Daniyarov, Kaz NU Bulletin. Physics series. 4 (55) 2015 [3] K. Gazeli, P. Svarnas, P. Vafeas, P. K. Papadopoulos, A. Gkelios, and F. Clément, Journal of Applied Physics, 114 (2013) 103304.
Topic number: 10 217 XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
PECVD of DLC & N-doped DLC Thin Films for Biomedical Applications
Hyun-Jin Seo P 1 P , Aiping Zeng 1 P , Sang-Hun Nam 1 P , Byungyou Hong P 2 P , Jin-Hyo Boo P 1
P 1 P
P
We have deposited pure diamond-like carbon (DLC) and nitrogen (N)-doped DLC thin films by plasma enhanced chemical deposition (PECVD) method. For bio-medical application test, nickel (Ni) nano particles have been electro-deposited on nitrogen-doped diamond-like carbon (N-DLC) thin film surface at potentials ranging from -1.1 V to -1.4 V vs Ag/AgCl in 0.1 M Na 2 SO
aqueous
solution containing 4 mM NiCl 2 . Atomic force microscopy has been used to investigate the growth of the nano particles. The mean growth rate of the particles increases while the nucleic density decreases when the deposition potential becomes more negative. There is a tendency to obtain large particles at more negative potentials. The growth kinetics has been studied with the dependence of potentiostatic current density on the deposition time, and the growth mechanism has been explained by the cyclic voltammogram of N-DLC film electrode in the deposition solution.
Metal nano particles deposited on highly boron doped diamond (BDD) thin film electrodes have been studied for electro-analysis application [1] because of the large potential window and low background current and inert surface with BDD electrodes. Recently, there is effect to replace BDD electrodes with nitrogen doped diamond-like carbon (N-DLC) electrodes, which have many chemical and mechanical properties similar to those of BDD thin film electrodes and can be deposited under easier conditions and have smoother surface because of amorphous structure [2]. Previously the authors [3] have reported that the nickel nano particles on N-DLC film possess catalytic function for glucose oxidation which indicates the potential application for direct glucose sensing. In this work, the deposition potential has been studied to control the nucleic density of nickel nano particles deposited on N-DLC film electrodes. This work is the first step to optimize nickel nano particles on N-DLC film for bio-medical sensing.
The N-DLC film was cut into 1.2 cm×1.2 cm squares for
nano particle deposition and
electrochemical testing. An O-ring fixture with an exposed area of Φ 7 mm was designed to seal the N-DLC film squares to service as working electrodes, and a platinum plate was employed as the count electrode opposite to the working electrode. An Ag/AgCl electrode with saturated KCl aqueous solution was taken as the reference electrode. The 3-D morphology of the nano particles deposited at different potentials is presented in Fig.1 and compared with that of as-deposited N-DLC film surface. The surface of as-deposited N-DLC film is very smooth at atomic scale. The nano particles presents the shape of rods, and they are sharp (pine-like) at the deposition potential of -1.1 V, while they become dull (corn-like) when the deposition potential gets more negative. The nano particles deposited at -1.1 V looks like jungles, while the particles are distantly separated at the more negative potentials.
Fig. 1. 3-D AFM Images for the nickel nano particles deposited on N-DLC film surface dependent on the deposition potential: a) -1.1 V, b) -1.2 V, and c) -1.3 V, and compared with that for e) the as-deposited DLC film surface.
[1]
K.E. Toghill, R.G. Compton, Electroanalysis 22 (2010) 1947. [2] G. Adamopoulos, C. Godet, C. Deslouis, H. Cachet, A. Lagrini, B. Saidani, Diamond Relat. Mater. 12 (2003) 613.
[3] A. Zeng, C. Jin, S.-J. Cho, H. O. Seo, Y.D. Kim, D.C. Lim, D. H. Kim, B.Y. Hong, J.-H. Boo, Mater. Res. Bull. 47 (2012) 2713.
Topic number 17 218 XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
Anomalous nonlinear effects in a weakly ionized gas exposed to a strong shock wave
J.V. Triaskin P 1 P , U V.A. Pavlov P 1 P
P 1 P
The patterns of exposure of the charged components to a strong shock wave in weakly ionized non-isothermal gas have been studied. The assumption of the ion sound is used for the plasma component. Computer simulation is based on the hypothesis of neglecting the action of the charged component perturbations upon the neutral gas component. The strong anomalous nonlinear effects are taking place. Joint competitive action of nonlinearity, dispersion, and dissipation is shown in formation of specific plasma «condensations» and «rarefactions». In a narrow range of shock wave speeds, the anomalous relaxation of plasma oscillations occurs behind the front. Essentially, it appears in the total ambipolar entrainment of charged components by a shock wave. This effect is the possible a result of strong nonlinear resonant (with the respect to shock wave speed) perturbation in the region ahead of the front.
The interaction of neutral and charged gas components is in a high interest. This attention is caused mostly by aerospace applications as well as for exploring the nonlinear wave processes in the near-Earth space. In this work, the interaction of strong shock waves and supersonic bodies with low- ionized plasma is presented and discussed. A motivation to the study is the discovery of the effect of anomalous supersonic flow of low-ionized plasma around a body in the absence of energy release ahead of the body [1]. Later, anomalous relaxation and instability of shock waves in gases were found in [2]. Generation of low-ionized gas- discharge non-isothermal plasma ahead of a body, streamlined by a supersonic flow, allows lowering the intensity of a strong shock wave [3]; this effect reduces the aerodynamic drag. The essence of the phenomenon is the formation of a region with elevated concentration of charged particles ahead of the front of a shock wave at certain speed of the latter. This critical speed is defined by the electron temperature and ion mass. Laboratory experiments show the flow around a body by weakly ionized air to differ markedly from that by heated neutral air. The ‘plasma effect’ is manifested in distancing of the head shock wave from the body and lowering of its intensity.
Under certain conditions, total ‘destruction’ of a shock wave is possible due to the presence of gas ionization ahead of the body. Analytical studies assumed rather far-reaching idealizations. Based on computer simulation [4], formation of a plasma precursor was shown to be possible ahead of the shock wave front – a soliton with a critical property: a non-monotonic resonant dependence of the soliton amplitude on the shock wave speed. The maximum perturbations develop at values of the shock wave speed in the range
, (
is the ion sound speed). In such situation, a sole, densest possible, local condensation of charged particles is formed in the precursor. The gas in the ‘condensation’ is not weakly ionized anymore, and charged particles can exert a reciprocal effect upon the neutral component and the shock wave. The ‘competition’ between strong nonlinearity and strong dispersion causes appearing of a sharp decrease of the soliton amplitude with the shock wave speed growing beyond critical value . Previously similar effect have been found in [5] in hydrodynamic and called ‘Houston’s horse’ effect.
[1] R.F.Avramenko, A.I. Klimov, Yu.L., Otkrytie No 007., (1986). [2] G.Mishin, A.P.Rjazin et al., Tech.Phys.11, (1981), pp.2315-2324 [3] V.A. Pavlov, Yu.L. Serov. 3rd Weakly Ionized Gases Workshop, Norfolk, USA, (1999), AIAA-99-4852. [4] V. A. Pavlov, Plasma Phys. Rep. 22, 167 (1996).
[5] V.A. Pavlov. Ya. V. Tryaskin. Journal of Applied Mechanics and Technical Physics, (2015), Vol. 56, No. 3, pp. 361–368.
Topic 4 219 XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
T. Takimoto 1 , R. Endo 1 , A. Tonegawa 1 , K. N. Sato 2 , K. Kawamura 1
Tokai University, 4-1-1 Kitakaname, Hiratsuka, Kanagawa, Japan 2
The relationship between recombination plasma and divergent magnetic field has been investigated on the linear divertor simulator TPD-Sheet IV. The divergent magnetic field was performed by individually controlling some stationary magnetic coils current and a magnet core. The neutral pressure in upstream and downstream (near the target) of the plasma (P up and P down ) was measured by Baratron vacuum gauges. The peak value of the neutral pressure difference (P down
– P up ) depends on the magnetic field strength ratio (R B ) between the upstream and downstream. This peak characteristic was similarly confirmed even if the discharge current was different. It is suggested that the degree of magnetic field divergence has the optimal value to promote recombination.
The divertor design for stable recombination plasma formation should be optimized to handle high heat and particle fluxes. Recently, a Super X divertor (SXD) is planned to accomplish an active neutral particles control to improve plasma confinement in the high-performance plasma for high power and a long pulse operation [1]. Both the divertor target geometry and the magnetic field design to be compatible with the high-performance plasma is one of key significant issues on stable recombination plasma. Although there are a number of papers on the numerical simulation of the SXD configuration [2], very little is known about the experimental simulation of the SXD-shaped target on recombination plasma formation. Design studies about SXD-shaped target in the divertor plasma are not easily understood because three-dimensional geometry of the target in divertor plasma of tokamaks is complex. Therefore, in order to verify more accurate validity, it is necessary to investigate by basic experiments how divergent magnetic field exerts changes on the plasma. To be more specific, it is important to clarify the relationship between recombination plasma and divergent magnetic field. We carried out the experiments for that on the linear divertor simulator TPD-Sheet IV [3]. The divergent magnetic field
was performed by individually controlling some stationary magnetic coils current and a magnet core. It was measured the electron temperature and density of the plasma near the target by a Langmuir probe. The neutral pressure in upstream and downstream (near the target) of the plasma (
up and P down
) was measured by Baratron vacuum gauges. 2. Results In the experiment, the recombination plasma was 3.5 4.0
4.5 5.0
5.5 0.05
0.10 0.15
0.20 0.25
0.30 0.35
ressure differe nce
[Pa] Magnetic field stregth ratio R B 70A
40A
Fig. 1. The relationship between the pressure difference peaks and the magnetic field strength ratio when the discharge current is 70 A and 40 A.
generated by changing the gas flow rate. In the condition of the gas flow rate where the recombination plasma exists, a peak of the neutral pressure difference P = P down
- P up was observed. The peak is considered to indicate the degree of neutralization by recombination. Each peak showed different values depending on the magnetic field strength ratio between the upstream and downstream (R B ). Figure 1 shows the relationship between the pressure difference peak and R B when the discharge current was 70 A and 40 A. Both discharge currents showed the characteristic that the pressure difference peaks became the maximum in a certain R B . It was suggested that R B (the degree of magnetic field divergence) has the optimal value to promote recombination. 3. References [1]
P. M. Valanju et al.: Fusion Engineering and Design 85 (2010) 46–52. [2]
E. Havlíčková et al.: Plasma Phys. Control. Fusion 57 (2015) 115001 (13pp). [3]
S. Tanaka et al.: Fusion Science and Technology, 63 (2013) 420-422. 8 220 XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
Deposition of diamond-like carbon film using high power impulse magnetron sputtering
T. Ohta 1 , A. Ishikawa U 1
2 , H. Kohsaka 3
1 Department of Electrical and Electronic Engineering, Meijo University, Nagoya, Japan 2 Department of Electrical and Electronic Engineering, Chiba Institute of Technology, Tsudanuma, Japan 3 Department of Mechanical Engineering, Gifu University, Gifu, Japan
Hydrogen-free diamond-like carbon film was deposited by using high power impulse magnetron sputtering in order to reduce the friction coefficient. The pressure dependence on the film structure was evaluated by using Raman spectroscopy.
Diamond-Like Carbon (DLC) film has excellent material properties such as chemical stability, high hardness, low friction, and so on. In the tribology field, the DLC films are expected to be applied to sliding parts of cars due to its excellent features. The hydrogen-free DLC film can also realize the reduction of the friction coefficient [1]. A high power impulse magnetron sputtering (HiPIMS), which is applying a high voltage in a short time to the target due to promote an ionization of the target particles, realizes a smooth surface, good adhesion and a very dense film.[2] In this study, hydrogen-free DLC films was deposited using HiPIMS.
The pulsed voltage of from 600 to 670V was applied to the target with the pulse duration of 50 μs and frequency of 500 Hz. Pure carbon target was used. The distance between the target and substrates were 50 mm. The gas flow rate of Ar was 100sccm and the pressure was change to be from 0.3 Pa to 3 Pa. Negative bias voltage of 100 V was applied to the substrate holder. Deposition time was 1 hour.
Fig.1 shows Raman spectra of DLC film with various pressures. Raman spectra of DLC film was composed of two peaks of D(disorder) band at 1350 cm -1 and G(graphite) band at 1590 cm -1 . G band represents the graphite structure and D band represents the defect lattice. Raman spectra show the typical DLC film in the range of 0.3 to 1 Pa. However, graphite film was observed at 3 Pa. Fig.2 shows the intensity ratio of the D and G band (I D /I G ) of Raman spectra as a function of pressure. I D /I G was estimated from the deconvolution of Raman spectra and represents relative sp2/sp3 composition ratio. I D /I
decreased with decreasing pressure up to 0.5Pa and then increased below 0.5 Pa. This result indicates that the sp3 structure in films increased with decreasing pressure due to ion bombardment. At below 0.5 Pa, however, the film was damaged by the large ion energy.
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