On phenomena in ionized gases
References [1] J. Sharpe, et al., Fusion Eng. Des. 63-64
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- Non-conventional plasma and sheath diagnostics: force probes and calorimetric probes
- References
- Diagnostics of atmospheric pressure plasma jets
- 4. Acknowledgments
- Microhollow cathode discharges on silicon devices
- 4. References
- Recent developments in probe diagnostics
- 2. Plasma Potential Probes (PPP)
- 2.1. Electron Emissive Probes (EEP)
- 2.2. Electron Screening Probes (ESP)
- Electric field measurements in surface discharges in atmospheric air over solid and liquid dielectrics
References [1]
J. Sharpe, et al., Fusion Eng. Des. 63-64 (2002) 153. [2]
A. Uccello, et al., Phys. Plasmas 23 (2016) 102506. [3]
G. Gervasini, et al., J. Fusion Energ. 36 (2017) 25-39.
[4] M. Bacharis, et al., Phys. Plasmas 17 (2010) 042505.
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XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
Non-conventional plasma and sheath diagnostics: force probes and calorimetric probes
Thomas Trottenberg and Holger Kersten P
D-24098 Kiel, Germany P
The talk focusses on measurements of forces that low-temperature plasmas exert on a boundary. Two different discharge types are used: a microwave generated plasma and a parallel plate radio- frequency discharge. The force measuring probe uses a small test surface integrated into a grounded wall or a grounded electrode, respectively. It is found that the plasma exerts pressures in the order of magnitude of the electron pressure in front of the wall, where the plasma pressure can range from below the electron pressure to a few times the electron pressure. Moderate collisions in the plasma seem to enhance the pressure at the wall, whereas too many collisions reduce the pressure. A recently published model is discussed. Furthermore, another non-conventional diagnostic, the calorimetric probe, is shortly presented together with measurements.
Recently, we reported on simple experiments that allowed measurements of the forces exerted by low- temperature plasmas on boundaries [1,2]. The measured “plasma pressures” were in the order of magnitude of up to a few times the electron pressure close to the sheath edge, i.e. some 10 mPa.
Fig. 1. Metal wall or electrode with integrated force probe. Only a small detail of the 170 mm disk is shown.
model taking into account the momentum fluxes across the sheath edge. It was concluded that ion- neutral collisions in the presheath can enhance the force caused by electron pressure and ion flux by a larger accelerated mass consisting of ions and fast neutral atoms.
The force probe is based on a cantilever and a test surface attached to its free end. The displacement is measured interferometrically and translated into the causing force by calibration. Figure 1 shows the implementation of the wall with probe. The circular test surface is flush with front surface of the wall. Langmuir probes are used for the basic diagnostics of the plasma environments (microwave plasma and radio-frequency parallel plate discharge).
The measurements are discussed in the light of a model for plane geometry [3].
Currently, we are working on the application of additional diagnostics (retarding field analyzer and calorimetric probe), which are integrated in the wall similarly to the force probe.
References
[1] T. Trottenberg, T. Richter, and H. Kersten. Eur. Phys. J. D 69, 91 (2015). [2] T. Trottenberg and H. Kersten. Plasma Sources Sci. Technol., accepted for publication (2017). [3] U. Czarnetzki and T. V. Tsankov, Eur. Phys. J. D 69, 236 (2015). Topic 6
23 XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
Diagnostics of atmospheric pressure plasma jets
A. West P , J. Bredin, S. Schröter P , K. Niemi P , T. Gans, J. Dedrick, D. O’Connell, E.Wagenaars
Atmospheric-pressure plasma jets (APPJs) are widely studied for potential applications in industry and healthcare. Plasma diagnostics play a pivotal role in developing an understanding of the science underpinning APPJs. This is essential to guarantee effective and safe use of these devices in applications. We present a picosecond Two-photon Absorption Laser Induced Fluorescence technique that is capable of directly measuring the effects of collisional quenching on the fluorescence decay and therefore allows accurate, absolute measurements of densities of N and O radicals in the open-air effluent of an APPJ. Additional power measurements allow the study of energy efficiency of N and O generation in APPJs as a function of operating frequency.
Atmospheric-pressure plasma jets (APPJs) are examples of plasmas that can operate in open air, remain at room temperature and still have a non- equilibrium chemistry. The unique combination of characteristics of these APPJ devices makes them ideal tools for novel applications in industry and healthcare, e.g. surface modification of plastics, plasma medicine and photoresist removal [1-3]. Although it is clear that reactive species play a pivotal role in the success of APPJs in many applications, the exact mechanisms through which APPJs affect target surfaces remain largely unknown. Moreover, control of the mixture of reactive species production as a function of operational parameters is often
empirical. Diagnostics of APPJs play an important role in further developing our understanding of the plasma chemistry and will enable increases in treatment efficacy.
Two-photon Absorption Laser
Induced Fluorescence (TALIF) is a well-known technique in low-pressure plasmas for the measurement of absolute densities of atomic species such as O, N and H. Unfortunately, application of this technique on APPJs that are operating under realistic conditions for applications, i.e. in open air and with complex admixtures, is not straightforward. The highly collisional environment of APPJs means that collisional quenching of the laser-excited state becomes significant and needs to be taken into account. For well-controlled atmospheres and simple admixtures the effect can be estimated using quenching coefficients [4], however under realistic operating conditions the identity and density of the quenching partners is unknown due to the complexity of the plasma chemistry. An alternative is a direct measurement of the fluorescence decay on sub-nanosecond timescales. We present
a picosecond TALIF diagnostic which uses a sub-ns laser (30 ps) and iCCD camera (200 ps), which allows us to measure the quenching-affected fluorescence decay rate directly and deduce absolute measurements of O and N density maps in the open- air effluent of an APPJ.
Measurements of the power dissipated in the plasma are of critical importance not only for further developing our understanding of APPJs, e.g. via comparison with modelling, but also in applications, e.g. for the optimisation of energy efficiency. Conceptually, measuring power in a radio-frequency (rf) circuit is relatively straightforward; however in practice it often turns out to be difficult to perform these measurements due to the small powers dissipated and the mostly capacitive nature of the load. We present a flexible, ‘post-matching’ technique that is capable of providing accurate measurements of power dissipated in rf-driven APPJs. This diagnostic is subsequently used to investigate the efficiency of the production of reactive O and N species for different rf excitation frequencies (13.56 MHz - 40.68 MHz).
The authors acknowledge support from the UK EPSRC (EP/K018388/1 & EP/H003797/1)
[1] D. Shaw et al., Plasma Sources Sci. Technol. 25 (2016) 065018. [2] A.M. Hirst et al., Br. J. Cancer 112 (2015) 1536. [3] A. West et al., Plasma Sources Sci. Technol. 25 (2016) 02LT01. [4] E. Wagenaars et al., Plasma Sources Sci. Technol. 21 (2012) 042002. 6 24
XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
Microhollow cathode discharges on silicon devices
R. Dussart P 1 P , R URM
. Michaud U 1 P , V. Felix 1 P
1 , O. Aubry 1 , P. Lefaucheux P 1 , S. Dzikowski 2 , V. Schulz-von der Gathen 2 , L.J. Overzet 3
P 1 P
2 Experimental Physics II, Ruhr-Universität Bochum, 44780 Bochum, Germany P
PSAL, University of Texas at Dallas, Richardson, TX 75080-3021, USA
DC Microhollow cathode discharges have been produced on silicon platforms through different gases such as He, Ar and N 2 . Silicon cathodes were investigated first, but induced many instabilities. Other materials deposited on the silicon were also tested and show much different behaviours. The microplasmas were optically and electrically characterized. The microreactors were also characterized after operation by SEM observations. Some new geometries were also tested to allow the injection of higher currents and powers (up to 1 W per microdicharge). By inversing the polarity, a quite different behaviour was evidenced that will be discussed as well.
DC Microhollow cathode discharges (MHCD) were first introduced in the mid 90’s [1]. Due to their dimension and their large surface to volume ratio, the produced microplasma remains cold and can stably operate at atmospheric pressure in the normal regime provided the cathode area is not fully utilized [2]. Microhollow cathode discharges on silicon platforms were first studied by J. G. Eden’s group [3]. Silicon processing intensively developed for
microelectronic devices
offers many
opportunities to design new, original and efficient devices to produce high density microplasmas. An array of 1064 microplasmas using an etched silicon cathode could be completely ignited [4]. Unfortunately, the device operation is unstable and produces many current spikes that significantly damage the microcavities and lead to device failure. The mechanism responsible for this unstable operation and short lifetime was investigated [5]. In this paper, we discuss different possibilities to enhance the stability of microdischarges made from silicon wafers. 2. Experiment A microreactor is schematically represented in Fig. 1. A ballast resistor is used to limit the current. 100 µm
Nickel SiO
2 (6 µm)
Silicon (500 µm)
V S + - Gold
(100 nm)
Figure 1: Schematic of a microdischarge reactor In this particular configuration, the silicon cathode was covered by a metal thin film (nickel in this example). More than 15 individual process steps are necessary to create such a structure. The devices were then tested in 3 different gases: He, Ar and N 2 .
3. Results An example of a microdischarge operating in Argon (150 µm diameter cavity) is shown in Fig. 2. A very stable operation is obtained using the configuration shown in Fig. 1. The lifetime of the microreactor with a confined cathode is much longer when using nickel than with silicon. Other materials were also investigated. Interestingly, the same type of instability is obtained using a tungsten cathode as with silicon. Modifying the geometry, it was possible to inject a total power of up to 40 W in an array of 38 argon microplasmas.
In the case of inverted polarity, a bright spot appears in the middle of the cavity.
[1] K.H. Schoenbach et al., Appl. Phys. Lett. 68 (1996) 13–15 [2] T. Dufour et al. , Appl. Phys. Lett. 93 (2008) 71508
[3] J.G. Eden et al., J. Phys. D: Appl. Phys. 36 (2003) 2869–77 [4] M.K. Kulsreshath et al., J. Phys. D: Appl. Phys.
[5] V. Felix et al., PSST 25 (2016) 025021 10 25
XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
Recent developments in probe diagnostics
C. Ionita 1 , B.S. Schneider 1 , S. Costea 1 , J. Kovačič 2 , M. Spolaore 3 , V. Naulin 4 ,
N. Vianello 3 , J.J. Rasmussen 4 , T. Gyergyek 2,5 , R. Stärz 1,6 , R. Schrittwieser 1
1 Institute for Ion Physics and Applied Physics, University of Innsbruck, Austria 2 Reactor Physics Department, Jožef Stefan Institute, Ljubljana, Slovenia 3 Consorzio RFX, Padua, Italy 4 Department of Physics, Technical University of Denmark, Kgs. Lyngby, Denmark 5 Faculty of Electrical Engineering, University of Ljubljana, Slovenia 6 Mechatronic Department, Management Center Innsbruck. A-6020 Innsbruck, Austria
Plasma probes are well established diagnostic tools. The easiest and fastest accessible parameter is their floating potential. While the floating potential of a cold probe is not very significant, we re- port on probes with the floating potential close to or ideally equal to the plasma potential. Such probes can either be electron emissive probes or so-called electron screening probes (e.g. ball-pen probes). We have developed strong emissive probes and a new type of electron screening probe, the bunker probe. By arrays of such probes also the electric field can be determined.
Plasma probes are simple and inexpensive with good spatial and temporal resolution. The easiest measureable parameter of a probe is its floating po- tential V
, which in case of a Cold Langmuir Probe (CLP) is of limited value since V
will regularly be more negative than the more important plasma po- tential
Φ pl .
We developed Plasma Potential Probes (PPP) the floating potential of which is close or even equal to Φ
. The best known are Electron Emissive Probes (EEP). Other types are the Ball-Pen Probe (BPP) [1] and the novel BUnker Probe (BUP) [2] .
2. Plasma Potential Probes (PPP) To shift the floating potential of a probe as close as possible to Φ
, (i) the inflowing plasma electron current must be compensated by an approx. equal emission current or (ii) the surplus of electron cur- rent must be screened off the probe until its magni- tude roughly equals that of the ions. This is tanta- mount to making the probe's current-voltage charac- teristic (IV-trace) symmetric. Method (i) is realised in EEPs by heating the probe until sufficient electron emission; (ii) can only be attained in a strong magnet- ic field as in case of the BPP or the BUP.
Our novel strong and ro- bust EEP [3] takes favoura- ble use of the basic proper- ties of Highly Orientated Pyrolytic Graphite (HOPG). An indirectly heated HOPG pin is shown in Fig. 1. HOPG has strongly different values of electric resis- tivity and heat conduction in directions perpendicu- lar to each other as indicated in Fig. 1.
Electron Screening Probes (ESP) For a BPP to work properly it must be quite exactly aligned perpendicular to the magnetic field B. In contrast to that, our novel BUP (Fig. 2) floats on the plasma potential also for a much larger range of angles with respect to B.
This work has been carried out within the framework of the EUROfusion Consortium and has received funding from the EURATOM research and training programme 2014-2018 under Grant Agreement No. 633053. The views and opinions expressed herein do not necessarily reflect those of the European Commission. This work was also supported by the Friedrich Schiedel Foundation for Energy Technology and the Commission for the Coordi- nation of Nuclear Fusion Research in Austria (Austrian Academy of Sciences).
[1] J. Adamek et al. Czech. J. Phys. 55 (2005) 235. [2] S. Costea et al., Rev. Sci. Instrum. 87 (2016), 053510. [3] B.S. Schneider et al., Proc. Sci., on line: http://pos.sissa.it/archive/conferences/240/072/ECP D2015_072.pdf.
6, Topical Inv. Fig. 1: Electron Emis- sive Probe Fig. 2: Bunker probe 26
XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
Electric field measurements in surface discharges in atmospheric air over solid and liquid dielectrics
M. Simeni Simeni 1 , B.M. Goldberg 2 , C. Zhang 3 , K. Frederickson 1 ,
W.R. Lempert 1 , and I.V. Adamovich 1
Department of Mechanical and Aerospace Engineering, Ohio State University 2 Department of Mechanical and Aerospace Engineering, Princeton University 3 Institute of Electrical Engineering, Chinese Academy of Sciences, Beijing, China
Time-resolved and spatially resolved electric field is measured in ns pulse dielectric barrier discharges sustained in ambient air over solid and liquid dielectric surfaces. The measurements are done using ps four-wave mixing diagnostics. The results indicate significant electric field reduction following ns pulse breakdown, followed by electric field reversal as the applied voltage is reduced. After the discharge pulse, the electric field decays on microsecond time scale, due to surface charge neutralization. The present results yield quantitative insight into kinetics of ns pulse surface ionization wave discharges and provide detailed experimental data for validation of kinetic models of ns pulse surface discharges.
This work presents the results of temporally and spatially resolved electric field measurements in a nanosecond pulse discharge in atmospheric air, sustained between a razor edge high-voltage electrode and a plane grounded electrode covered by a thin dielectric plate or a by a layer of distilled water. The electric field is measured by picosecond four-wave mixing in a collinear phase-matching geometry, with time resolution of approximately 2 ns, using an absolute calibration provided by measurements of a known electrostatic electric field. In discharges over quartz plate and over liquid surface, the results demonstrate electric field offset on the discharge center plane before the discharge pulse due to surface charge accumulation on the dielectric from the weaker, opposite polarity pre-pulse. During the discharge pulse, the electric field follows the applied voltage until “forward” breakdown occurs, after which the field in the plasma is significantly reduced due to charge separation. When the applied voltage is reduced, the field in the plasma reverses direction and increases again, until the weak “reverse” breakdown occurs, producing a secondary transient reduction in the electric field. After the pulse, the field is gradually reduced on a microsecond time scale, likely due to residual surface charge neutralization by transport of opposite polarity charges from the plasma. Spatially resolved electric field measurements show that the discharge develops as a surface ionization wave. Significant surface charge accumulation on the dielectric surface is detected near the end of the discharge pulse. Spatially resolved measurements of electric field vector components demonstrate that the vertical electric field in the surface ionization wave peaks ahead of the horizontal electric field. Behind the wave, the vertical field remains low, near the detection limit, while the horizontal field is gradually reduced to near the detection limit at the discharge center plane. These results are consistent with time-resolved measurements of electric field components, which also indicate that vertical electric field reverses direction after the ionization wave. Topic numbers 3, 6
Figure 1. Time-resolved electric field measured in the negative polarity ns pulse discharge pulse over liquid water, on the discharge center plane ~ 100 μm below the high-voltage electrode . 27 |
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