Bug 'kimyoviy birikmasi [ tahrirlash
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Bug 1000
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CVD usuli :
SiC , Si3N4, BN va AlN uchun gaz fazasini cho'ktirish SiC : CH3SiCl3 → SiC + 3HCl Si3N4: 3SiCl4 + 4NH3 → Si3N4 + 12HCl BN: BCl3 + NH3 → BN + 3HCl AlN : AlCl3 + NH3 → AlN + 3HCl
CVD / CVI qoplama tizimlarining standart turlari kattalashtirish CVD o'simlik - yotqizish usullari Turi: KCE®-FCT CVD 900 Download 51.65 Kb. Do'stlaringiz bilan baham: 
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