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21.01.2023
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#1106161
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Bog'liq
Bug 1000
CVD usuli :
SiC , Si3N4, BN va AlN uchun gaz fazasini cho'ktirish
SiC :
CH3SiCl3 → SiC + 3HCl
Si3N4:
3SiCl4 + 4NH3 → Si3N4 + 12HCl
BN:
BCl3 + NH3 → BN + 3HCl
AlN :
AlCl3 + NH3 → AlN + 3HCl
CVD / CVI qoplama tizimlarining
standart turlari
kattalashtirish CVD o'simlik
- yotqizish usullari
Turi: KCE®-FCT CVD 900
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