Bug 'kimyoviy birikmasi [ tahrirlash


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Bog'liq
Bug 1000

CVD usuli : 
SiC , Si3N4, BN va AlN uchun gaz fazasini cho'ktirish
SiC :
CH3SiCl3 → SiC + 3HCl
Si3N4:
3SiCl4 + 4NH3 → Si3N4 + 12HCl
BN:
BCl3 + NH3 → BN + 3HCl
AlN :
AlCl3 + NH3 → AlN + 3HCl

































CVD / CVI qoplama tizimlarining standart turlari

kattalashtirish CVD o'simlik - yotqizish usullari
Turi: KCE®-FCT CVD 900


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