On phenomena in ionized gases
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- 5. References
- Characterization of electronic transport properties of semiconductor films during plasma processing
- Plasma generation and processing of interstellar carbonaceous dust analogs
- Modelling and interpretation of micrometric dust behaviour in tokamaks
4. Plasma processing Finally, we studied ozone generation and NO removal with the nanosecond discharges and found that the shortest rise-time pulses result in the highest plasma processing yields (at the cost of high by- product formation). Figure 2 shows an example. The maximum obtained ozone yield was 190 g/kWh in air and the maximum NO removal yield was 2.5 mol/kWh.
Fig. 2 O
3 yield for 9-ns pulses with different rise times.
[1] T. Huiskamp et al., IEEE T. Plasma. Sci, 43 (2015) 444-451.
[2] T. Huiskamp et al., IEEE Sens. J., 16 (2016) 3792-3801.
[3] T. Huiskamp et al., Plasma Sources Sci. T., 25 (2016) 054006.
[4] T. Huiskamp et al., Rev. Sci. Instrum., 87 (2016) 123509.
17-18 17 XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
Characterization of electronic transport properties of semiconductor films during plasma processing
S. Nunomura P , I. Sakata P , K. Matsubara P
Tsukuba, Ibaraki 305-8568, Japan P
The electronic transport properties of hydrogenated amorphous silicon (a-Si:H) film during plasma enhanced chemical vapor deposition (PECVD) have been studied. We find that during PECVD, carrier transport is governed by plasma induced defects located near the surface (< 20nm). On the other hand, trapped carriers are distributed not only in the defect rich surface layer but also in the bulk layer. The origin for carrier trapping is recognized to be the band tail states, rather than the deep level defect states, associated Si dangling bonds.
Carrier transport is an key factor that determines the performances of semiconductor devices such as solar cells and transistors. Particularly, in those devices including amorphous materials of semiconductors, the transport is limited by carrier trapping, related to various defects and impurities. So far, the transport and trapping phenomena have been studied mainly for as-grown films or devices at room temperature. However, those have not been studied under plasma processing, even though the defects are usually created under plasma processing. Here, we study the electronic transport properties of a-Si:H film during PECVD [1]. We measured the photo and trap-induced currents in a-Si:H film growing on a glass substrate during PECVD [2]. These currents are measured under pump (532 nm, 0.4mW) and probe (1432 nm, 500mW) light. The pump generated photoexcited carriers and filled the traps, whereas the probe was used to emit trapped carriers to the conduction band. These carriers were then collected by the interdigitated contacts on the glass substrates. The measured optoelectronic properties of a-Si:H films during PECVD are shown in Fig. 1. It is confirmed that the thickness, d, is nicely proportional to the growth time, t, while the optical constants stay nearly constant. The growth rate and optical constants are 0.17 nm/s, E
= 1.61 eV, n = 4.6, and k = 0.45 at 532 nm. Figure 1 (c) shows the time evolution of photo and trap currents, I p and I t . Interestingly, both currents remain nearly zero at an initial stage of growth (t < 120 s, i.e., d < 20 nm) and then increase gradually with t. The photoconductivity,
, is improved with t, as shown in Fig. 2(d). Such time evolutions suggest that a defect-rich surface layer is formed initially, and then the bulk layer is grown underneath it. This defect-rich surface layer is evaluated to be less than 20 nm. The time evolution of trapped carrier density, n
/n v , determined from I t /I p [3]
is shown in Fig. 2(d). We find that n t /n v stays roughly constant as the film grows with t. The result indicates that the trapped carriers are distributed homogeneously along the direction of growth. The absolute density of trapped carriers is the order of 10 17
-3 for the device grade intrinsic a-Si:H [2]. In the talk, the correlation between transport properties and device performances will be also presented. [1] S. Nunomura, I. Sakata, M. Kondo, Appl. Phys.
[2] S. Nunomura and I. Sakata, AIP Adv. 4 (2014) 097110. [3] S. Nunomura, X. Che, and S. R. Forrest, Adv. Mater. 26 (2014) 7555.
Topic number: 6 Fig. 1. Opt-electrical properties of a-Si:H film during PECVD. (a) Thickness, d, and optical bandgap, E g . (b)
refractive index, n, and extinction coefficient, k. (c) photo and trap currents, I p and I t . (d) photoconductivity,
, and the normalized trapped carrier density, n t /n v , 18
XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal Topic number 12 Two-dimensional plasma crystals: waves and instabilities L. Cou¨edel 1 , V. Nosenko 2 , S. Zhdanov 2 , I. Laut 2 , A. V. Ivlev 3 , E. V. Yakovlev 4 , A. Y. Kislov 4 ,
4 , and A. M. Lipaev 5 1
2 Institut f¨ur Materialphysik im Weltraum, Deutsches Zentrum f¨ur Luft- und Raumfahrt (DLR), Weßling, Germany. 3 Max Planck Institute for extraterrestrial Physics, Garching b. M¨unchen, Germany. 4 Bauman Moscow State Technical University, Moscow, Russia. 5 Joint Institute for High Temperatures, Russian Academy of Sciences, Moscow, Russia. Wake-mediated interactions result in the coupling between wave modes in 2D complex plasma crystals, which can trigger the mode-coupling instability and cause melting. Spec- tra of phonons with out-of-plane polarization were studied experimentally in 2D plasma crystals during dedicated experiments on the mode-coupling instability. The kinematics of dust particles during the early stage of mode-coupling induced melting is explored. It is found that the formation of the hybrid mode causes the particle vibrations to partially synchronize at the hybrid frequency. The spatial orientation of the synchronization pattern correlates well with the directions of the maximal increment of the shear-free hybrid mode. Complex plasmas consist of particles immersed in a weakly ionised plasmas. Due to the absorp- tion of ambient electrons and ions, microparticles ac- quire negative charges and can form coupled systems. Microparticles injected in capacitively-coupled radio- frequency discharges levitate in the sheath region near the bottom electrode, where the electric field can bal- ance gravity. Under certain conditions the particles can form a monolayer and arrange themselves into or- dered structures: 2D plasma crystals. In such crys- tals, two in-plane wave modes with an acoustic dis- persion can be sustained (longitudinal and transverse modes). Since the strength of the vertical confinement is finite, there is a third fundamental wave mode as- sociated with the out-of- plane oscillations that has a negative optical dispersion [1]. Due to the strong electric field in the sheath region, every particle is in- fluenced by a strong ion flow. The ions tend to fo- cus downstream of the particles making the system highly polarized (plasma wake). In 2D plasma crys- tals, wake-mediated interactions result in the coupling of the crystal in-plane and out-of-plane modes into a shear-free hybrid mode of the lattice layer and trigger the mode-coupling instability (MCI) [1, 2, 3] which can melt the crystal [4]. Localised “hot spots” in the lattice phonon spectra are a typical signature of this mode [1, 3]. MCI induced melting can only be trig- gered if (i) the modes intersect, and (ii) the neutral gas damping is sufficiently low. In this paper, spectra of phonons with out-of- plane polarisation were studied experimentally in 2D plasma crystals. The dispersion relation was directly measured using a method of particle imaging that al- lowed us to resolve the particle motion in the 3 di- mensions. We observed experimentally the coupling between the out-of-plane mode and the in-plane lon- gitudinal mode which under certain conditions can form hybridised modes and trigger the MCI[5, 6]. The kinematics of dust particles during the early stage of MCI revealed that the formation of the hybrid mode induces the partial synchronisation of the particle os- cillations at the hybrid frequency [7, 8]. Phase- and frequency-locked hybrid particle motion in both ver- tical and horizontal directions was evidenced. The spatial orientation of the synchronisation pattern cor- relates well with the directions of the maximal incre- ment of the shear-free hybrid mode. Asymmetries ob- served in the current fluctuation spectra come from inhomogeneities of the horizontal confinement [8]. A theory of MCI in shear-deformed crystals explains the asymmetry of hot spots[9]. References [1] S. K. Zhdanov, et al., Phys. Plasmas 16 (2009), 083706. [2] A. V. Ivlev, G. Morfill, Phys. Rev. E 63 (2001), 016409.
[3] L. Cou¨edel, et al., Phys. Plasmas 18 (2011) 083707. [4] J. D. Williams, et al., Phys. Rev. E 86 (2012), 046401.
[5] L. Cou¨edel, et al., Phys. Rev. Lett. 104 (2010), 195001. [6] L. Cou¨edel, et al., EPL 115 (2016), 45002. [7] L. Cou¨edel, et al., Phys. Rev. E 89 (2014), 053108.
[8] I. Laut, et al., EPL 110 (2015), 65001. [9] A. V. Ivlev, et al., Phys. Rev. E 91 (2015), 063108. 19
XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
Reactivity, relaxation and dissociation of molecules in plasma modeling
Fabrizio Esposito P 1 P
P 1 Consiglio Nazionale delle Ricerche, PlasmiLab@Nanotec, Bari, Italy
Detailed information on the dynamics and kinetics of molecular collisions are of key importance in accurate modeling of aerothermodynamics, combustion, laser and plasma physics. A discussion of the relevant problems, solutions and achievements will be presented, taking into account the need of complete data in the plasma modeling community.
1. Vibrational kinetics: the input data In the plasma community it is nowadays well recognized the key role of vibrational energy exchanges among molecular species in plasmas [1]. Non-equilibrium conditions including vibrational energy are commonly studied in this field, and this implies the use of state-to-state (sts) data for all the relevant species of interest. In the past, simple models of vibrational energy transfer and dissociation from excited vibrational states have been used for this aim, and often continue to be used. However, it is now possible to calculate sts data accurately, with reasonable amounts of computational resources and with accurate interaction potentials [2,3,4]. These data can also include reaction, with production of new species with vibrational distributions quite different from the purely inelastic data. The insights and possibilities offered by these accurate and detailed data will be shown, with particular emphasis on the differences with simple models. Different methods are available, with specific features that have to be wisely studied, exploited and merged in order to get the most accurate and complete results [1,5], without neglecting the computational efficiency, which is a strict requirement, due to the large mass of calculations involved. A discussion about the use of these methods for both vibrational energy exchange with and without reaction and dissociation will be presented.
[1]
M.Capitelli, R.Celiberto, G.Colonna, F.Esposito, C.Gorse, K.Hassouni, A.Laricchiuta, S.Longo, Fundamental Aspects of Plasma Chemical Physics. Springer New York (2016). Available from: http://link.springer.com/10.1007/978-1-4419-8185-1
[2] R.Celiberto, I.Armenise, M.Cacciatore, M. Capitelli, F.Esposito, P.Gamallo, R.K.Janev, A.Laganà, V.Laporta, A.Laricchiuta, A.Lombardi, M.Rutigliano, R.Sayós, J.Tennyson and J.M Wadehra, Atomic and molecular data for spacecraft re-entry plasmas. Plasma Sources Science and Technology. 25 (2016) 033004.(doi:
10.1088/0963- 0252/25/3/033004) [3] G.D’Ammando, M.Capitelli, F.Esposito, A.Laricchiuta, L.D.Pietanza, G.Colonna. The role of radiative reabsorption on the electron energy distribution functions in H 2 /He plasma expansion through a tapered nozzle. Physics of Plasmas. 21 (2014) 093508.(doi:
10.1063/1.4895481) [4] M.Capitelli, D.Bruno, C.Catalfamo, R.Celiberto, G.Colonna, C.M.Coppola, G.D’Ammando, O.De Pascale, P.Diomede, F.Esposito, C.Gorse, A.Laricchiuta, S.Longo, and F.Taccogna, in Atomic and Plasma–Material
Energy Agency, Vienna, 2014), pp. 24–36 (http://www- pub.iaea.org/MTCD/publications/PDF/apid16_web. pdf) [5] F.Esposito, C.M.Coppola, D.De Fazio. Complementarity between Quantum and Classical Mechanics in Chemical Modeling. The H + HeH + →
H 2 + + He Reaction: A Rigourous Test for Reaction Dynamics Methods. The Journal of Physical Chemistry A. 119 (2015) 12615−12626 (doi:
10.1021/acs.jpca.5b09660) Topic 1
20 XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
Plasma generation and processing of interstellar carbonaceous dust analogs
V. J. Herrero 1 , I. Tanarro 1 , B. Maté 1 , R. J. Peláez 1 , G. Molpeceres 1 , V. Timón 1 ,
R. Escribano 1 , and M. Jiménez-Redondo 2
P 1 P
2 Centro de Física da Universidade do Minho, Universidade do Minho, 4710-057, Braga, Portugal Different samples of plasma deposited amorphous hydrogenated carbon (HAC or a-C:H) are used as analogs of carbonaceous dust in the diffuse interstellar (IS) medium. Comparison of measured and theoretically calculated spectra suggests that IS dust grains are likely made of small aromatic islands linked by aliphatic chains. Irradiation of the HAC deposits with 5 keV electrons shows that the effects of cosmic rays on the aliphatic dust component, characterized by an absorption band at 3.4 m, are small and cannot explain the disappearance of this band in dense interstellar clouds. 1. Introduction IR absorption spectra indicate that carbonaceous dust in the diffuse IS medium is largely made of some sort of amorphous hydrogenated carbon (HAC). Two alternative models for the structure of this dust can be found in the literature. One of them favors small aromatic islands linked by aliphatic chains [1], whereas the other one proposes large polyaromatic structures with small aliphatic substituents at the edges [2]. The most prominent spectroscopic feature of the aliphatic component of IS carbonaceous dust (the 3.4 m absorption band) disappears inside dense molecular clouds. In this environment, shielded from the UV galactic field, cosmic rays (CR) could provide a destruction mechanism, but again discrepant CR destruction efficiencies are found in the literature [3, 4]. In this work, we use IS carbonaceous dust analogs produced in cold hydrocarbon plasmas in combination with theoretical calculations and irradiation with high energy electrons to help clarify these questions.
Dust grains and thin films of HAC were generated by plasma deposition in RF discharges. Mixtures of hydrocarbons and He were used as plasma precursors. The deposition conditions were selected to obtain HAC films with a variable proportion of aliphatic and aromatic structures. Optical spectroscopy, mass spectrometry and Langmuir probes were used for plasma diagnosis. HAC deposits were analyzed mainly with IR spectroscopy, but other techniques (SEM, AFM, ...) were also used. The effects of cosmic rays on the carriers of the 3.4
m feature were investigated by irradiating the HAC samples with 5 keV electrons. 3. Theoretical calculations Models of HAC solids of variable density, based on the mentioned competing structures [1,2], were constructed using Montecarlo/Molecular Mechanics and their electronic energies and IR spectra were computed at Density Functional Theory (DFT) level. 4. Results and conclusion The comparison of measured and calculated IR spectra [5] suggests that the structure of carbonaceous dust in the diffuse IS medium is intermediate between those of the two literature models [1,2] but closer to that with small aromatic units [1]. The estimated effects of cosmic rays are found to be small and are not enough to explain the disappearance of the 3.4 m band inside dense clouds [6]. At present, we intend to relate the gas-phase characteristics of the plasma with the properties of the carbonaceous solids produced in the discharges. We expect thus to shed light on gas phase polymerization mechanisms that might be of relevance for the interstellar medium. 5. References [1] E. Dartois et al. A&A 432 (2005) 895 [2] M. Steglich et al. ApJSS 208 (2013) 26 [3] V. E. Mennella et al. ApJ. 587 (2003) 727 [2] M. Godard et al., A&A, 529 (2011) A146 [5] G. Molpeceres et al. PCCP 19 (2017) 1352 [6] B. Maté et al. ApJ 831 (2016) 51 12
21 XXXIII ICPIG, July 9-14, 2017, Estoril/Lisbon, Portugal
E. Lazzaro 1 , F. Ghezzi 1 , A. Uccello 1 , G. Gervasini 1 , M. De Angeli 1
P 1 P
As tokamak devices approach more closely and reliably the technical conditions required for confinement of a deuterium-tritium burning plasma, it becomes clear that optimization of the plasma performance requires better understanding of important physics processes occurring in the scrape-off layer which is actually a “composite” plasma, consisting of multiple ion species and heterogeneous dust with variable charge and mass. A number of questions are addressed by numerical models, concerning the mobilization of dust from the plasma facing components, its migration and redeposition in the tokamak configuration and eventually its destiny of ablation and plasmoid formation. A brief overview of selected problems is presented here, with an assessment of the most interesting results and open questions, especially focused on the tungsten and beryllium dust particles in the tokamak JET-ILW (ITER-like wall).
The performance of magnetic confinement nuclear fusion systems, like tokamaks, depends significantly on the “purity” of the reacting mixture (Z eff
not » 1). Realistic confinement implies some interaction of the thermonuclear plasma with the tokamak’s wall thorough the plasma facing components (PFCs), mainly leading to PFCs sputtering and eventually to the production of mobilizable solid particulate or dust [1]. The expected number density of these particles is low, but they can be important sources of plasma contamination through input of high Z elements, causing strong radiative losses (observed often as transient impurity events, TIEs) and also gross magnetohydrodynamic instabilities eventually evolving in disruptions. Alternatively, their impact and interaction with the PFCs can cause the damage of their surface, instantaneous and cumulative. Moreover, these meso-sized dust particles can retain the radioactive tritium (T) and, moving almost freely within the vessel, could significant affect the T inventory of the tokamak. Validated numerical modeling tools such as dust trajectory calculators [2-4], can provide qualitative and quantitative description of the mobilization and fate of selected bunches of dust grains. Key issues are addressed here in a first investigation of tungsten (W) and beryllium (Be) dust mobilization, redeposition and plasma pollution in the tokamak JET-ILW (i.e. ITER-like wall). The results presented are produced by the dust trajectory code DUSTTRACK [2,3] of IFP-CNR, based on real and realistic background plasma configurations of JET-ILW. Figure 1 shows a pragmatic example of the output of the code relative to the motion of several tungsten dust particles mobilized from the JET-ILW’s full-W divertor. On one hand, it is clear that several dust particles can reach the hot and confined plasma (the region inside the last
closed magnetic surface, LCMS)
significantly polluting it. On the other hand, one can see that the dust particles could be transported and finally deposited in places far away from their mobilization spot. In case of dust particles with a high fraction of T, this can be particularly relevant since their behaviour possibly affects the tokamak’s inventory of tritium.
Fig.1: Poloidal trajectories of 101 W dust particles launched from the divertor of JET-ILW. Download 9.74 Mb. Do'stlaringiz bilan baham: |
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